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Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Overview of attention for article published in Journal of Scheduling, May 2014
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About this Attention Score

  • Among the highest-scoring outputs from this source (#22 of 129)
  • Above-average Attention Score compared to outputs of the same age (54th percentile)

Mentioned by

patent
2 patents

Citations

dimensions_citation
49 Dimensions

Readers on

mendeley
39 Mendeley
Summary Patents Dimensions citations
So far, Dimensions has found 49 publications that cite this research output.

49

The most recent citing publications are shown below. View all 49 publications that cite this research output on Dimensions.

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