SIC epitaxial wafer and method for manufacturing same Grant US-9287121-B2 United States of America 15 Mar 2016
Epitaxial SiC single crystal substrate and method of manufacture of epitaxial SiC single… Grant US-8716718-B2 United States of America 06 May 2014
Method for recovering an on-state forward voltage and, shrinking stacking faults in… Grant US-8455269-B2 United States of America 04 Jun 2013
Process for producing silicon carbide semiconductor device Grant US-8367510-B2 United States of America 05 Feb 2013