7.4 nm linewidth Pt nanowires by electron-beam lithography using non-chemically amplified positive-tone resist and post-exposure bake
Article in Japanese Journal of Applied Physics (April 2024)
The most recent citing publications are shown below. View all 5 publications that cite this research output on Dimensions.
Article in Japanese Journal of Applied Physics (April 2024)
Article in ACS Applied Polymer Materials (April 2020)
Article in Chemistry of Materials (February 2017)