Performance of amorphization AlCrTiZrMo high entropy alloy barrier for copper metallization
Article in Journal of Materials Research and Technology (January 2024)
The most recent citing publications are shown below. View all 15 publications that cite this research output on Dimensions.
Article in Journal of Materials Research and Technology (January 2024)
Article in Surface and Coatings Technology (November 2023)
Article in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (May 2023)