Method and assembly for characterizing a mask or a wafer for microlithography Grant US-11269260-B2 United States of America 08 Mar 2022
A METHOD AND APPARATUS FOR ATOMIC PROBE TOMOGRAPHY Application EP-3531438-A1 European Patent Office 28 Aug 2019
Inspection apparatus, inspection method and manufacturing method Grant US-9823586-B2 United States of America 21 Nov 2017