Experimental and numerical study on thin silicon wafer CO2 laser cutting and damage investigation
Article in The International Journal of Advanced Manufacturing Technology (April 2024)
The most recent citing publications are shown below. View all 8 publications that cite this research output on Dimensions.
Article in The International Journal of Advanced Manufacturing Technology (April 2024)
Article in Journal of Materials Engineering and Performance (December 2022)
Article in IEEE Sensors Journal (January 2022)