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Chapter title |
Statistical Methods Applied to a Semiconductor Manufacturing Process
|
---|---|
Chapter number | 20 |
Book title |
Frontiers in Statistical Quality Control 8
|
Published by |
Physica-Verlag HD, January 2006
|
DOI | 10.1007/3-7908-1687-6_20 |
Book ISBNs |
978-3-79-081686-0, 978-3-79-081687-7
|
Authors |
Takeshi Koyama |