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Fundamental Electron Interactions with Plasma Processing Gases

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Cover of 'Fundamental Electron Interactions with Plasma Processing Gases'

Table of Contents

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    Book Overview
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    Chapter 1 Fundamental Electron-Molecule Interactions and Their Technological Significance
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    Chapter 2 Electron-Molecule Interactions in the Gas Phase: Cross Sections and Coefficients
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    Chapter 3 Synthesis and Assessment of Electron Collision Data
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    Chapter 4 Electron Interactions with CF 4 , C 2 F 6 , and C 3 F 8
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    Chapter 5 Electron Interactions with CHF 3 , CF 3 I, and c -C 4 F 8
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    Chapter 6 Electron Interactions with Cl 2 , CCl 2 F 2 , BCl 3 , and SF 6
Attention for Chapter 5: Electron Interactions with CHF 3 , CF 3 I, and c -C 4 F 8
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Chapter title
Electron Interactions with CHF 3 , CF 3 I, and c -C 4 F 8
Chapter number 5
Book title
Fundamental Electron Interactions with Plasma Processing Gases
Published by
Springer, Boston, MA, January 2004
DOI 10.1007/978-1-4419-8971-0_5
Book ISBNs
978-1-4613-4741-5, 978-1-4419-8971-0
Authors

Loucas G. Christophorou, James K. Olthoff

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