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Fundamental Electron Interactions with Plasma Processing Gases
Overview of attention for book
Table of Contents
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Book Overview
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Chapter 1
Fundamental Electron-Molecule Interactions and Their Technological Significance
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Chapter 2
Electron-Molecule Interactions in the Gas Phase: Cross Sections and Coefficients
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Chapter 3
Synthesis and Assessment of Electron Collision Data
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Chapter 4
Electron Interactions with CF 4 , C 2 F 6 , and C 3 F 8
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Chapter 5
Electron Interactions with CHF 3 , CF 3 I, and c -C 4 F 8
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Chapter 6
Electron Interactions with Cl 2 , CCl 2 F 2 , BCl 3 , and SF 6
Overall attention for this book and its chapters
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Mentioned by
syllabi
1
institution with syllabi
Citations
dimensions_citation
174
Dimensions
Readers on
mendeley
57
Mendeley
Book overview
1. Fundamental Electron-Molecule Interactions and Their Technological Significance
2. Electron-Molecule Interactions in the Gas Phase: Cross Sections and Coefficients
3. Synthesis and Assessment of Electron Collision Data
4. Electron Interactions with CF 4 , C 2 F 6 , and C 3 F 8
5. Electron Interactions with CHF 3 , CF 3 I, and c -C 4 F 8
6. Electron Interactions with Cl 2 , CCl 2 F 2 , BCl 3 , and SF 6
Summary
Syllabi
Dimensions citations
This data is correct as of December 2015 - for more up to date information, please visit
https://opensyllabus.org/
So far, Altmetric has seen this research output assigned in
2
syllabi from
1
institutions on Open Syllabus Project.
Institution
Syllabi count
Course subject areas covered
University of Tulsa
2
Unknown