Polymeric precision doping as an emerging technology for the downscaling of microelectronic devices: State of the art
Article in European Polymer Journal (March 2024)
The most recent citing publications are shown below. View all 17 publications that cite this research output on Dimensions.
Germanium monolayer doping: successes and challenges for the next generation Ge devices
Article in Materials Science in Semiconductor Processing (November 2023)
3D to 2D perspectives - Traditional and new doping and metrology challenges at the nanoscale
Article in Materials Science in Semiconductor Processing (August 2023)