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Chapter title |
Ion Beam Based Patterning of Porous Silicon
|
---|---|
Chapter number | 109 |
Book title |
Handbook of Porous Silicon
|
Published by |
Springer International Publishing, December 2016
|
DOI | 10.1007/978-3-319-04508-5_109-1 |
Book ISBNs |
978-3-31-904508-5
|
Authors |
Mark Breese |
Editors |
Leigh Canham |