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@jvstab editor's pick @AVS_Members @AvsPlasma @AvsAld Improving SiO<sub>2</sub> to SiN<italic><sub>x</sub></italic> etch selectivity during atomic layer etching with multiple selective organic pre-functionalization ste
@jvstab editor's pick @AVS_Members @AvsPlasma @AvsAld Improving SiO<sub>2</sub> to SiN<italic><sub>x</sub></italic> etch selectivity during atomic layer etching with multiple selective organic pre-functionalization ste