Mapping Oxidation and Wafer Cleaning to Device Characteristics Using Physics-Assisted Machine Learning
Article in ACS Omega (January 2022)
The most recent citing publications are shown below. View all 5 publications that cite this research output on Dimensions.
Article in ACS Omega (January 2022)
Article in International Journal of Software Engineering and Knowledge Engineering (February 2015)
Conference proceeding in 2013 IEEE 4th International Conference on Software Engineering and Service Science (October 2014)