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Excimer Laser Technology

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Cover of 'Excimer Laser Technology'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 Introductory Remarks
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    Chapter 2 Historical Review of Excimer Laser Development
  4. Altmetric Badge
    Chapter 3 Trends in Worldwide Excimer Laser Sales
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    Chapter 4 Some Fundamentals of Laser Physics
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    Chapter 5 Principles of Excimer Lasers
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    Chapter 6 Design and Technology of Excimer Lasers
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    Chapter 7 High-Repetition-Rate and High-Power Lasers
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    Chapter 8 High-Energy Lasers
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    Chapter 9 Excimer Lasers for Microlithography
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    Chapter 10 Laser Beam Characterization
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    Chapter 11 Optical Coatings for Excimer Laser Applications
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    Chapter 12 Small Structures with Large Excimer Lasers
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    Chapter 13 Overview
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    Chapter 14 Ablation
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    Chapter 15 Micro-Machining
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    Chapter 16 Via Drilling
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    Chapter 17 Micro-Processing of Borosilicate Glass and Polymers
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    Chapter 18 F 2 -Laser Microfabrication for Photonics and Biophotonics
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    Chapter 19 Nano-Structuring with Femtosecond Excimer Laser Pulses
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    Chapter 20 Physical Aspects of Ultra-Fast UV Laser Transfer
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    Chapter 21 Microlithography
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    Chapter 22 TFT Annealing
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    Chapter 23 Fiber Bragg Gratings
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    Chapter 24 Marking
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    Chapter 25 Activation and Metallization of Dielectrics
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    Chapter 26 Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films
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    Chapter 27 Combustion Analysis
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    Chapter 28 Medical Applications of Excimer Lasers
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    Chapter 29 High-Intensity Applications of Excimer Lasers
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    Chapter 30 High-Repetition-Rate Applications of Excimer Lasers
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    Chapter 31 New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5 nm
Attention for Chapter 3: Trends in Worldwide Excimer Laser Sales
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Chapter title
Trends in Worldwide Excimer Laser Sales
Chapter number 3
Book title
Excimer Laser Technology
Published in
ADS, January 2005
DOI 10.1007/3-540-26667-4_3
Book ISBNs
978-3-54-020056-7, 978-3-54-026667-9
Authors

Stephen G. Anderson, Anderson, Stephen G.

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 1 Mendeley reader of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 1 100%

Demographic breakdown

Readers by professional status Count As %
Student > Master 1 100%
Readers by discipline Count As %
Physics and Astronomy 1 100%