Impact of alternating precursor supply and gas flow on the LPCVD growth behavior of polycrystalline 3C-SiC thin films on Si
Article in Sensors and Actuators A Physical (July 2024)
The most recent citing publications are shown below. View all 18 publications that cite this research output on Dimensions.
Article in Sensors and Actuators A Physical (July 2024)
Article in physica status solidi (b) (February 2024)
Article in Physica B Condensed Matter (February 2023)