Extending atomic layer deposition for use in next-generation piezoMEMS: Review and perspective
Article in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (July 2023)
The most recent citing publications are shown below. View all 20 publications that cite this research output on Dimensions.
Article in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (July 2023)
Article in Applied Physics Reviews (November 2021)
Article in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (May 2021)