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Chapter title |
Experimental Investigation of the Frictional Behaviors at Particle-Surface Interfaces in CMP Application Using an Atomic Force Microscope
|
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Chapter number | 164 |
Book title |
Advanced Tribology
|
Published by |
Springer, Berlin, Heidelberg, January 2009
|
DOI | 10.1007/978-3-642-03653-8_164 |
Book ISBNs |
978-3-64-203652-1, 978-3-64-203653-8
|
Authors |
In-Ha Sung, Hung-Gu Han, Hosung Kong |