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TOF MS Investigation of Nickel Oxide CVD

Overview of attention for article published in Journal of the American Society for Mass Spectrometry, August 2017
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Title
TOF MS Investigation of Nickel Oxide CVD
Published in
Journal of the American Society for Mass Spectrometry, August 2017
DOI 10.1007/s13361-017-1765-1
Pubmed ID
Authors

Anastasia S. Kondrateva, Maxim V. Mishin, Sergey E. Alexandrov

Abstract

NiO layers were deposited by metal-organic chemical vapor deposition using bis-(ethylcyclopentadienyl) nickel (EtCp)2Ni and oxygen or ozone. As a continuation of kinetic study of NiO MOCVD the gas-phase, transformations of (EtCp)2Ni were studied in the temperature range of 380-830 K. Time of reactions corresponding to the residence time of the gas stream in hot zone of the reactor was about 0.1 s under conditions studied. The interaction of (EtCp)2Ni with oxygen started at 450 K and its conversion rate reached the maximum at 700 K. The interaction of (EtCp)2Ni with ozone started at 400 K and its conversion rate reached the maximum at 600 K. Transformations of the gas phase with the temperature in the reaction zone were studied, the model reaction schemes illustrating (EtCp)2Ni transformations in the reaction systems containing oxygen and ozone have developed. In the reaction system (EtCp)2Ni-O2-Ar the main gas-phase products at 380-500 K were CO, CO2, HCO, C2H5OH, CpCOOH, and CpO. Formation of the C2H2O, C3H4O, and C5H8O was found at 630-830 K. The same gas-phase species, (C4H3O)2Ni and dialdehydes was formed in the reaction system (EtCp)2Ni-O3-O2-Ar. Graphical Abstract ᅟ.

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Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 14 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 14 100%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 4 29%
Student > Master 2 14%
Professor 1 7%
Unspecified 1 7%
Student > Bachelor 1 7%
Other 1 7%
Unknown 4 29%
Readers by discipline Count As %
Materials Science 7 50%
Physics and Astronomy 1 7%
Unspecified 1 7%
Unknown 5 36%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 1. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 30 October 2017.
All research outputs
#22,764,772
of 25,382,440 outputs
Outputs from Journal of the American Society for Mass Spectrometry
#3,431
of 3,835 outputs
Outputs of similar age
#287,571
of 328,185 outputs
Outputs of similar age from Journal of the American Society for Mass Spectrometry
#72
of 81 outputs
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So far Altmetric has tracked 3,835 research outputs from this source. They receive a mean Attention Score of 3.8. This one is in the 1st percentile – i.e., 1% of its peers scored the same or lower than it.
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We're also able to compare this research output to 81 others from the same source and published within six weeks on either side of this one. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.