You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Chapter title |
Formation of Si/SiO 2 Heterostructures by Low-Temperature, Plasma-Assisted Oxidation and Deposition Processes
|
---|---|
Chapter number | 16 |
Book title |
The Physics and Chemistry of SiO 2 and the Si-SiO 2 Interface 2
|
Published by |
Springer, Boston, MA, January 1993
|
DOI | 10.1007/978-1-4899-1588-7_16 |
Book ISBNs |
978-1-4899-1590-0, 978-1-4899-1588-7
|
Authors |
G. Lucovsky, Yi Ma, T. Yasuda, S. Habermehl |