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Chapter title |
Structural Relaxation and Growth of SiO<Subscript>2</Subscript> Films on Si
|
---|---|
Chapter number | 16 |
Book title |
The Physics and Chemistry of SiO 2 and the Si-SiO 2 Interface
|
Published by |
Springer, Boston, MA, January 1988
|
DOI | 10.1007/978-1-4899-0774-5_16 |
Book ISBNs |
978-1-4899-0776-9, 978-1-4899-0774-5
|
Authors |
R. W. Rendell, K. L. Ngai |