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Chapter title |
3-D Nano Object Recognition by Use of Phase Sensitive Scatterometry
|
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Chapter number | 23 |
Book title |
Three-dimensional Imaging, Visualization, and Display
|
Published in |
ADS, January 2009
|
DOI | 10.1007/978-0-387-79335-1_23 |
Book ISBNs |
978-0-387-79334-4, 978-0-387-79335-1
|
Authors |
Daesuk Kim, Byung Joon Baek, Bahram Javidi, Kim, Daesuk, Baek, Byung Joon, Javidi, Bahram |