Electron beam lithography and dimensional metrology for fin and nanowire devices on Ge, SiGe and GeOI substrates
Article in Microelectronic Engineering (August 2023)
The most recent citing publications are shown below. View all 18 publications that cite this research output on Dimensions.
Fabrication of Highly n‑Type-Doped Germanium Nanowires and Ohmic Contacts Using Ion Implantation and Flash Lamp Annealing
Article in ACS Applied Electronic Materials (November 2022)
Electrical Characterization of Germanium Nanowires Using a Symmetric Hall Bar Configuration: Size and Shape Dependence
Article in Nanomaterials (October 2021)