Impact of alternating precursor supply and gas flow on the LPCVD growth behavior of polycrystalline 3C-SiC thin films on Si
Article in Sensors and Actuators A Physical (July 2024)
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Article in Sensors and Actuators A Physical (July 2024)
Conference proceeding in AIP Conference Proceedings (May 2024)
Article in Materials Characterization (June 2023)