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Handbook of Advanced Plasma Processing Techniques

Overview of attention for book
Attention for Chapter 1: Some Fundamental Aspects of Plasma-Assisted Etching
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Citations

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6 Mendeley
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Chapter title
Some Fundamental Aspects of Plasma-Assisted Etching
Chapter number 1
Book title
Handbook of Advanced Plasma Processing Techniques
Published by
Springer, Berlin, Heidelberg, January 2000
DOI 10.1007/978-3-642-56989-0_1
Book ISBNs
978-3-64-263096-5, 978-3-64-256989-0
Authors

J. W. Coburn

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 6 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 6 100%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 3 50%
Researcher 1 17%
Student > Master 1 17%
Unknown 1 17%
Readers by discipline Count As %
Physics and Astronomy 2 33%
Materials Science 1 17%
Engineering 1 17%
Unknown 2 33%