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Chapter title |
The Use of Confocal Light Microscopy in the Study of X-Ray Contact Images on PMMA Resist
|
---|---|
Chapter number | 82 |
Book title |
X-Ray Microscopy III
|
Published by |
Springer, Berlin, Heidelberg, January 1992
|
DOI | 10.1007/978-3-540-46887-5_82 |
Book ISBNs |
978-3-66-213894-6, 978-3-54-046887-5
|
Authors |
P. C. Cheng, D. M. Shinozaki, Cheng, P. C., Shinozaki, D. M. |