You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Mendeley readers
| Chapter title |
Diagnostics and Endpoint Detection
|
|---|---|
| Chapter number | 7 |
| Book title |
Dry Etching for VLSI
|
| Published by |
Springer, Boston, MA, January 1991
|
| DOI | 10.1007/978-1-4899-2566-4_7 |
| Book ISBNs |
978-1-4899-2568-8, 978-1-4899-2566-4
|
| Authors |
A. J. van Roosmalen, J. A. G. Baggerman, S. J. H. Brader, van Roosmalen, A. J., Baggerman, J. A. G., Brader, S. J. H. |
Mendeley readers
The data shown below were compiled from readership statistics for 2 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 2 | 100% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Researcher | 1 | 50% |
| Unknown | 1 | 50% |
| Readers by discipline | Count | As % |
|---|---|---|
| Unknown | 2 | 100% |