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Chapter title |
A Modular CMOS Foundry Process for Integrated Piezoresistive Pressure Sensors
|
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Chapter number | 30 |
Book title |
Advanced Microsystems for Automotive Applications 2005
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Published by |
Springer, Berlin, Heidelberg, January 2005
|
DOI | 10.1007/3-540-27463-4_30 |
Book ISBNs |
978-3-54-024410-3, 978-3-54-027463-6
|
Authors |
G. Dahlmann, G. Hölzer, S. Hering, U. Schwarz, Dahlmann, G., Hölzer, G., Hering, S., Schwarz, U. |