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Chapter title |
Einführung und Begriffsbestimmung
|
---|---|
Chapter number | 1 |
Book title |
Mikrosystemtechnik
|
Published by |
Vieweg+Teubner Verlag, January 2004
|
DOI | 10.1007/978-3-322-84878-9_1 |
Book ISBNs |
978-3-51-916256-8, 978-3-32-284878-9
|
Authors |
Ulrich Mescheder, Mescheder, Ulrich |