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Chapter title |
Performance of Submicron Silicon MOSFETs Fabricated by Edge-Defined Vertical-Etch Technique
|
---|---|
Chapter number | 11 |
Book title |
The Physics of Submicron Structures
|
Published by |
Springer, Boston, MA, January 1984
|
DOI | 10.1007/978-1-4613-2777-6_11 |
Book ISBNs |
978-1-4612-9714-7, 978-1-4613-2777-6
|
Authors |
H. Shichijo, Y. T. Lin, T. C. Holloway, Y. C. Lin, W. R. Hunter, Shichijo, H., Lin, Y. T., Holloway, T. C., Lin, Y. C., Hunter, W. R. |