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Chapter title |
A Novel Silicon Oxidation Method — HF Enhanced Oxidation
|
---|---|
Chapter number | 11 |
Book title |
The Physics and Chemistry of SiO 2 and the Si-SiO 2 Interface
|
Published by |
Springer, Boston, MA, January 1988
|
DOI | 10.1007/978-1-4899-0774-5_11 |
Book ISBNs |
978-1-4899-0776-9, 978-1-4899-0774-5
|
Authors |
Long Wei, Xu Yuan-sen, Zheng Yang-shu |