A process for producing a micromechanical component, and component produced thereby Grant DE-10357421-B4 Germany 11 Sep 2008
LOW VOLTAGE TUNABLE FILTRE WITH PHOTONIC CRYSTAL Application WO-2003083533-A3 World Intellectual Property Organisation (WIPO) 18 Mar 2004
LOW VOLTAGE TUNABLE FILTRE WITH PHOTONIC CRYSTAL Application WO-2003083533-A2 World Intellectual Property Organisation (WIPO) 09 Oct 2003