↓ Skip to main content

Micro and Nano Fabrication

Overview of attention for book
Attention for Chapter 10: Enabling Technologies II—Contamination Control
Altmetric Badge

Citations

dimensions_citation
49 Dimensions

Readers on

mendeley
2 Mendeley
You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output. Click here to find out more.
Chapter title
Enabling Technologies II—Contamination Control
Chapter number 10
Book title
Micro and Nano Fabrication
Published by
Springer, Berlin, Heidelberg, January 2015
DOI 10.1007/978-3-662-44395-8_10
Book ISBNs
978-3-66-244394-1, 978-3-66-244395-8
Authors

Hans H. Gatzen, Volker Saile, Jürg Leuthold

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 2 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 2 100%

Demographic breakdown

Readers by professional status Count As %
Lecturer > Senior Lecturer 1 50%
Unknown 1 50%
Readers by discipline Count As %
Unknown 2 100%