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Chapter title |
Micro Leverage Design of Silicon Resonant Accelerometer
|
---|---|
Chapter number | 33 |
Book title |
Advances in Intelligent, Interactive Systems and Applications
|
Published by |
Springer, Cham, June 2018
|
DOI | 10.1007/978-3-030-02804-6_33 |
Book ISBNs |
978-3-03-002803-9, 978-3-03-002804-6
|
Authors |
Yan Li, Xinrui Zhang, Li, Yan, Zhang, Xinrui |