CMOS Scaling for the 5 nm Node and Beyond: Device, Process and Technology
Article in Nanomaterials (May 2024)
The most recent citing publications are shown below. View all 24 publications that cite this research output on Dimensions.
Multiple SiGe/Si layers epitaxy and SiGe selective etching for vertically stacked DRAM
Article in Journal of Semiconductors (December 2023)
Monolithic Integration of O-Band InAs Quantum Dot Lasers with Engineered GaAs Virtual Substrate Based on Silicon
Article in Nanomaterials (August 2022)