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Micromanufacturing and Nanotechnology

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Cover of 'Micromanufacturing and Nanotechnology'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Principles of MEMS and MOEMS
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    Chapter 3 Laser Technology in Micromanufacturing
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    Chapter 4 Soft Geometrical Error Compensation Methods Using Laser Interferometer
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    Chapter 5 Characterising Etching Processes in Bulk Micromachining
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    Chapter 6 Features of Surface Micromachining and Wafer Bonding Process
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    Chapter 7 Micromanufacturing for Document Security: Optically Variable Devices
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    Chapter 8 Nanofinishing Techniques
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    Chapter 9 Micro and Nanotechnology Applications for Space Micropropulsion
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    Chapter 10 Carbon Nanotube Production and Applications: Basis of Nanotechnology
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    Chapter 11 Carbon based Nanostructures
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    Chapter 12 Molecular Logic Gates
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    Chapter 13 Nanomechanical Cantilever Devices for Biological Sensors
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    Chapter 14 Micro Energy and Chemical Systems (MECS) and Multiscale Fabrication
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    Chapter 15 Sculptured Thin Films
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    Chapter 16 e-Beam Nanolithography Integrated with Nanoassembly: Precision Chemical Engineering
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    Chapter 17 Nanolithography in the Evanescent Near Field
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    Chapter 18 Nanotechnology for Fuel Cell Applications
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    Chapter 19 Derivatisation of Carbon Nanotubes with Amines: A Solvent-free Technique
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    Chapter 20 Chemical Crosslinking in C60 Thin Films
Attention for Chapter 5: Characterising Etching Processes in Bulk Micromachining
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Citations

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Chapter title
Characterising Etching Processes in Bulk Micromachining
Chapter number 5
Book title
Micromanufacturing and Nanotechnology
Published by
Springer, Berlin, Heidelberg, January 2006
DOI 10.1007/3-540-29339-6_5
Book ISBNs
978-3-54-025377-8, 978-3-54-029339-2
Authors

S. K. Bag, Bag, S. K.

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 11 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Mexico 2 18%
Japan 1 9%
Argentina 1 9%
Unknown 7 64%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 6 55%
Researcher 3 27%
Student > Bachelor 1 9%
Professor > Associate Professor 1 9%
Readers by discipline Count As %
Engineering 7 64%
Chemistry 4 36%