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| Chapter title |
Microcharacterization
|
|---|---|
| Chapter number | 6 |
| Book title |
The Physics of Micro/Nano-Fabrication
|
| Published by |
Springer, Boston, MA, January 1992
|
| DOI | 10.1007/978-1-4757-6775-9_6 |
| Book ISBNs |
978-1-4419-3221-1, 978-1-4757-6775-9
|
| Authors |
Ivor Brodie, Julius J. Muray |