↓ Skip to main content
What is this page? Embed badge

The Physics of Micro/Nano-Fabrication

Overview of attention for book
Cover of 'The Physics of Micro/Nano-Fabrication'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 Preliminary Survey
  3. Altmetric Badge
    Chapter 2 Particle Beams
  4. Altmetric Badge
    Chapter 3 Plasmas
  5. Altmetric Badge
    Chapter 4 Layering Technologies
  6. Altmetric Badge
    Chapter 5 Pattern Generation
  7. Altmetric Badge
    Chapter 6 Microcharacterization
  8. Altmetric Badge
    Chapter 7 Limits to Nanofabrication
Attention for Chapter 6: Microcharacterization
Altmetric Badge

Citations

dimensions_citation
57 Dimensions
Summary Dimensions citations
So far, Dimensions has found 57 publications that cite this research output.

57

The most recent citing publications are shown below. View all 57 publications that cite this research output on Dimensions.

This page shows the most recent citations of this research output.

Click here to find out how to access more activity.

This page is provided by Altmetric.