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Chapter title |
Synchrotron White Beam X-Ray Topography and High Resolution X-RayDiffraction Studies of Defects in SiC Substrates, Epilayers and Device Structures
|
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Chapter number | 26 |
Book title |
Silicon Carbide
|
Published by |
Springer, Berlin, Heidelberg, January 2004
|
DOI | 10.1007/978-3-642-18870-1_26 |
Book ISBNs |
978-3-64-262333-2, 978-3-64-218870-1
|
Authors |
M. Dudley, X. Huang, W. M. Vetter, Dudley, M., Huang, X., Vetter, W. M. |