You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Chapter title |
Micromachining of SiC
|
---|---|
Chapter number | 28 |
Book title |
Silicon Carbide
|
Published by |
Springer, Berlin, Heidelberg, January 2004
|
DOI | 10.1007/978-3-642-18870-1_28 |
Book ISBNs |
978-3-64-262333-2, 978-3-64-218870-1
|
Authors |
C. A. Zorman, M. Mehregany |