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| Chapter title |
Process Simulation
|
|---|---|
| Chapter number | 15 |
| Book title |
Microelectronic Materials and Processes
|
| Published by |
Springer, Dordrecht, January 1989
|
| DOI | 10.1007/978-94-009-0917-5_15 |
| Book ISBNs |
978-0-7923-0154-7, 978-9-40-090917-5
|
| Authors |
W. Fichtner, Fichtner, W. |