You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
| Chapter title |
Diffusion in Semiconductors
|
|---|---|
| Chapter number | 12 |
| Book title |
Microelectronic Materials and Processes
|
| Published by |
Springer, Dordrecht, January 1989
|
| DOI | 10.1007/978-94-009-0917-5_12 |
| Book ISBNs |
978-0-7923-0154-7, 978-9-40-090917-5
|
| Authors |
U. Gösele, Gösele, U. |