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Chapter title |
Effects of Deposition Temperature and Hydrogen Plasma on the Properties of the Radio-Frequency Magnetron Sputtering Deposition of ZnO-Al 2 O 3 Films
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Chapter number | 90 |
Book title |
Intelligent Technologies and Engineering Systems
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Published by |
Springer, New York, NY, January 2013
|
DOI | 10.1007/978-1-4614-6747-2_90 |
Book ISBNs |
978-1-4614-6746-5, 978-1-4614-6747-2
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Authors |
Fang-Hsing Wang, Chia-Cheng Huang, Chien-Chen Diao, Chia-Ching Wu, Cheng-Fu Yang, Wang, Fang-Hsing, Huang, Chia-Cheng, Diao, Chien-Chen, Wu, Chia-Ching, Yang, Cheng-Fu |