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High Dielectric Constant Materials

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Table of Contents

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    Book Overview
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    Chapter 1 The Economic Implications of Moore's Law
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    Chapter 2 Brief Notes on the History of Gate Dielectrics in MOS Devices
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    Chapter 3 SiO 2 Based MOSFETS: Film Growth and Si—SiO 2 Interface Properties
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    Chapter 4 Oxide Reliability Issues
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    Chapter 5 Gate Dielectric Scaling to 2.0—1.0 nm: SiO 2 and Silicon Oxynitride
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    Chapter 6 Optimal Scaling Methodologies and Transistor Performance
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    Chapter 7 Silicon Oxynitride Gate Dielectric for Reducing Gate Leakage and Boron Penetration Prior to High-k Gate Dielectric Implementation
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    Chapter 8 Alternative Dielectrics for Silicon-Based Transistors: Selection Via Multiple Criteria
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    Chapter 9 Materials Issues for High-k Gate Dielectric Selection and Integration
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    Chapter 10 Designing Interface Composition and Structure in High Dielectric Constant Gate Stacks
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    Chapter 11 Electronic Structure of Alternative High-k Dielectrics
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    Chapter 12 Physicochemical Properties of Selected 4d, 5d, and Rare Earth Metals in Silicon
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    Chapter 13 High-k Gate Dielectric Deposition Technologies
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    Chapter 14 Issues in Metal Gate Electrode Selection for Bulk CMOS Devices
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    Chapter 15 CMOS IC Fabrication Issues for High-k Gate Dielectric and Alternate Electrode Materials
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    Chapter 16 Characterization and Metrology of Medium Dielectric Constant Gate Dielectric Films
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    Chapter 17 Electrical Measurement Issues for Alternative Gate Stack Systems
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    Chapter 18 High-k Gate Dielectric Materials Integrated Circuit Device Design Issues
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    Chapter 19 High-k Crystalline Gate Dielectrics: A Research Perspective
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    Chapter 20 High-k Crystalline Gate Dielectrics: An IC Manufacturer's Perspective
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    Chapter 21 Advanced MOS-Devices
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High Dielectric Constant Materials
Published by
Springer Berlin Heidelberg, March 2006
DOI 10.1007/b137574
978-3-54-021081-8, 978-3-54-026462-0

Huff, H.R., Gilmer, D.C.

Mendeley readers

The data shown below were compiled from readership statistics for 30 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Ireland 1 3%
United States 1 3%
Korea, Republic of 1 3%
Unknown 27 90%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 10 33%
Researcher 5 17%
Student > Master 5 17%
Unspecified 4 13%
Professor 2 7%
Other 4 13%
Readers by discipline Count As %
Engineering 13 43%
Materials Science 8 27%
Unspecified 5 17%
Physics and Astronomy 3 10%
Chemistry 1 3%
Other 0 0%