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Chapter title |
Power Deposition in Low Pressure, Capacitively Coupled RF Discharges
|
---|---|
Chapter number | 23 |
Book title |
Microwave Discharges
|
Published by |
Springer, Boston, MA, January 1993
|
DOI | 10.1007/978-1-4899-1130-8_23 |
Book ISBNs |
978-1-4899-1132-2, 978-1-4899-1130-8
|
Authors |
L. C. Pitchford, Ph. Belenguer, J. P. Boeuf, Pitchford, L. C., Belenguer, Ph., Boeuf, J. P. |