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Microwave Discharges

Overview of attention for book
Cover of 'Microwave Discharges'

Table of Contents

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    Book Overview
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    Chapter 1 The Contribution of Surface-Wave-Sustained Plasmas to HF Plasma Generation, Modeling and Applications: Status and Perspectives
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    Chapter 2 Wave Propagation in Bounded Plasmas
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    Chapter 3 Microwave Discharges : Structures and Stability
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    Chapter 4 Non-Linear Behaviour of Surface Wave Propagation in Plasma-Waveguides
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    Chapter 5 Modeling of Surface Wave Produced Discharges in Argon at Low to Intermediate Pressure
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    Chapter 6 Strongly Damped Surface Waves in Plasmas
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    Chapter 7 Theory of Low-Pressure Plasma Columns Produced by Electromagnetic Waves in the Presence of a Constant Axial Magnetic Field
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    Chapter 8 Some Aspects of Nonlinear Theory of Ionizing Surface Plasma Waves
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    Chapter 9 Surface-Wave Plasma Sources
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    Chapter 10 Modeling of Surface-Wave-Sustained Plasmas in Static Magnetic Fields: A Tool for the Study of Magnetically Assisted HF Plasmas
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    Chapter 11 ECR Plasma Sources
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    Chapter 12 Distributed ECR: Concept, Performances and Perspectives
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    Chapter 13 Large Area Planar Microwave Plasmas
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    Chapter 14 Fabry-Perot-Type Microwave Resonator
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    Chapter 15 Diagnostics of Microwave Discharges
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    Chapter 16 Thermal Discharges: Experiments and Diagnostics
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    Chapter 17 Optical Diagnostics in Radiofrequency Glow and Afterglow
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    Chapter 18 Optical Diagnostics for High Electron Density Plasmas
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    Chapter 19 Use of Emissive Probes in HF Plasmas
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    Chapter 20 Experimental and Theoretical Determination of Electron Energy Distribution Functions in Surface Wave Plasmas
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    Chapter 21 Kinetic Modeling of Microwave Discharges
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    Chapter 22 Collision Dominated Electron Kinetics in Low and High Frequency Fields
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    Chapter 23 Power Deposition in Low Pressure, Capacitively Coupled RF Discharges
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    Chapter 24 Time Dependent Electron Energy Distribution Functions in Molecular Gases
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    Chapter 25 Excitation Equilibria in Plasmas; A Classification
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    Chapter 26 Nonequilibrium Motion of Electrons and Ions Near Absorbing Boundaries
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    Chapter 27 Applications of Microwave Discharges to High-Power Light Sources
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    Chapter 28 Semiconductor Processing Applications of Microwave Plasmas
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    Chapter 29 Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas
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    Chapter 30 Production of Active Species in Flowing Microwave Discharges for Iron Surface Treatment and Diamond Film Deposition
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    Chapter 31 Surface Wave Plasmas in O 2 -N 2 Mixtures as Active Species Sources for Surface Treatments
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    Chapter 32 Applications of Distributed Electron Cyclotron Resonance (DECR) to Plasma-Surface Interaction
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    Chapter 33 Applications of Microwave Discharges to Elemental Analysis
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    Chapter 34 Microwave Methods for the Fabrication of Optical Fibres
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    Chapter 35 Diamond Films: Procedures and Parameters
Attention for Chapter 13: Large Area Planar Microwave Plasmas
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Citations

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Chapter title
Large Area Planar Microwave Plasmas
Chapter number 13
Book title
Microwave Discharges
Published by
Springer, Boston, MA, January 1993
DOI 10.1007/978-1-4899-1130-8_13
Book ISBNs
978-1-4899-1132-2, 978-1-4899-1130-8
Authors

Andreas Ohl