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Chapter title |
Morphological Investigations of Low-k Polymer/Diffusion Barrier Interfaces for IC Metallization
|
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Chapter number | 12 |
Book title |
Metallization of Polymers 2
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Published by |
Springer, Boston, MA, January 2002
|
DOI | 10.1007/978-1-4615-0563-1_12 |
Book ISBNs |
978-1-4613-5134-4, 978-1-4615-0563-1
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Authors |
Sujatha Sankaran, Robert E. Geer |