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Chapter title |
Scanning Acoustic Microscopy as a Non-Destructive Technique for Process Monitoring of High Power Semiconductor Devices
|
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Chapter number | 114 |
Book title |
Acoustical Imaging
|
Published by |
Springer, Boston, MA, January 1992
|
DOI | 10.1007/978-1-4615-3370-2_114 |
Book ISBNs |
978-1-4613-6487-0, 978-1-4615-3370-2
|
Authors |
J. Attal, B. Bianco, A. Cambiaso, D. E. Crees, P. Dargent, F. Fasce, D. R. Newcombe, J. C. Noack, J. M. Saurel, M. Zambelli |