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Chapter title |
Yield Analysis and Quality Assurance and Control Methods Used in Microsystems Manufacturing
|
---|---|
Chapter number | 9 |
Book title |
Process Variations in Microsystems Manufacturing
|
Published by |
Springer, Cham, January 2020
|
DOI | 10.1007/978-3-030-40560-1_9 |
Book ISBNs |
978-3-03-040558-8, 978-3-03-040560-1
|
Authors |
Michael Huff |