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Chapter title |
Stress Engineering Using Si 3 N 4 for Stiction Free Release of SOI Beams
|
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Chapter number | 123 |
Book title |
Physics of Semiconductor Devices
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Published by |
Springer, Cham, January 2014
|
DOI | 10.1007/978-3-319-03002-9_123 |
Book ISBNs |
978-3-31-903001-2, 978-3-31-903002-9
|
Authors |
Suman A. Gupta, Apoorva Shenoy, Monisha, V. Uma, M. N. Vijayaraghavan, Navakanta Bhat, Gupta, Suman A., Shenoy, Apoorva, Uma, V., Vijayaraghavan, M. N., Bhat, Navakanta |