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Chapter title |
Synthesis and Characterization of Phosphorus Doped Hydrogenated Silicon Films by Filtered Cathodic Vacuum Arc Technique
|
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Chapter number | 137 |
Book title |
Physics of Semiconductor Devices
|
Published by |
Springer, Cham, January 2014
|
DOI | 10.1007/978-3-319-03002-9_137 |
Book ISBNs |
978-3-31-903001-2, 978-3-31-903002-9
|
Authors |
Ajay Kesarwani, O. S. Panwar, R. K. Tripathi, Sreekumar Chockalingam, Kesarwani, Ajay, Panwar, O. S., Tripathi, R. K., Chockalingam, Sreekumar |